NON-RECTANGULAR FEATURES |
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In the early implementations of the PYRAMID approach, the circuit features are assumed to be of rectangular shape. However, some real circuit patterns may contain other shapes of features such as circle, triangle, trapezoid, etc. Therefore, the PYRAMID implementations have been extended to support non-rectangular shapes of features.
EXPERIMENTAL RESULT |
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Fresnel Zone Plate Lens (MFS=18nm, HSQ on Si)